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Inspection microscope for semiconductors

The optical system that was originallydeveloped for the best-selling FS60models was further enhanced for the FS70models. It is ideal as the microscope unitof a prober station for semiconductors. (Allmodels CE marked.)• The FS70L supports thr

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The optical system that was originallydeveloped for the best-selling FS60models was further enhanced for the FS70models. It is ideal as the microscope unitof a prober station for semiconductors. (Allmodels CE marked.)• The FS70L supports three types of YAGlaser wavelength ranges (1064nm, 532nmand 355nm), while the FS70L4 supportstwo types of wavelength ranges (532nmand 266nm), thus expanding the scope oflaser applications, allowing laser-cuttingof thin-films used in semiconductors andliquid crystal substrates. Bright field, Differential InterferenceContrast (DIC) and polarized observationsare standard with the FS70Z. The FS70Land FS70L4 do not support the DICmethod.• By employing an inward turret, the longworking distance objectives provideexcellent operability.• An ergonomic design with superboperability: the FS70 employs the erectimageoptical system (the image in thefield of view has the same orientation asthe specimen) and enlarged fine focusadjustment wheel with rubber grip coarseadjustment

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