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3-Axis Non-contact Measuring Microscope

• The world highest accuracy XY measuring accuracy of (0.9+3L/1000)μm • Selectable LAF (Laser Auto Focus) function • High operability and repeatability • Three-axis motorized control • Power-drive a

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• The world highest accuracy XY measuring accuracy of (0.9+3L/1000)μm • Selectable LAF (Laser Auto Focus) function • High operability and repeatability • Three-axis motorized control • Power-drive auto focus unit is a standard feature.

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